A 4 Ã?â?? 4 matrix model with three degrees of freedom is proposed as a means for controlling microvibrations and applied to\r\nan electromagnetic isolator. The model was derived from an assumption based on small- and low-frequency vibrations. The\r\ncoordinates of the 3 DOF was composed of the 4 variables, representing a vertical position, pitch, roll, and a proof term. The\r\ncoordinates were calculated from the 4 position sensors in the isolator and formulated into a 4 Ã?â?? 4 matrix, which possesses\r\ninversive full rank. The electro-magnetic isolator was built for a simulated machine in semiconductor manufacturing and consisted\r\nof a heavy surface plate, sensors, amps, a controller, and air springs with electromagnets. The electromagnets are installed in a\r\npneumatic chamber of the individual air spring. The performance of the 3 DOF model was experimented and compared with that\r\nof a 1 DOF model in an impact test. The settling time in the result was reduced to 25%.
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